The world“s most advanced EUV lithography machine, why can only rely on the optical lens of Zeiss Germany

2020-08-07 15:33:34 0 Comment 2700 views
abstract

When talking about chips, many people often refer to lithography machines. When talking about lithography machines, the first thing that many people s


The world“s most advanced EUV lithography machine, why can only rely on the optical lens of Zeiss Germany

When talking about chips, many people often refer to lithography machines. When talking about lithography machines, the first thing many people should think of is ASML, a leading lithography machine manufacturer headquartered in the Netherlands. They think ASML is a very amazing company because TSMC, Intel, Samsung Electronics, Large wafer manufacturers such as SMIC and GF all rely on ASM's lithography equipment. Especially in the industry’s leading levelUV lithography machine.

However, what few people know is that behind ASM, there is a very great company in the world. It is Carl Zeiss headquartered in Germany. If there is no optical lens from Zeiss, then Asmar's extreme ultraviolet (EUV) lithography machine is impossible to talk about. At present, Zeiss has the most extreme ultraviolet lithography machine patents in the world, and has become one of Asim’s partners. The two parties have a very close relationship.

Zeiss is committed to R&D and sales of photolithography, measurement technology, microscopes, medical technology, spectacle lenses, cameras and film lenses, telescopes and planetarium technologies. ZEISS continues to promote the world's optical development and technological progress with its leading solutions. Zeiss has four business divisions, namely semiconductor manufacturing technology, medical technology, industrial quality and research, and consumer electronics.Expense market. Zeiss in the Chinese market is divided into six major business sectors, specifically divided into industrial measurement, microscope, medical technology, vision care, optical consumer products and semiconductor manufacturing technology. Moreover, Guangzhou, China has become one of Zeiss's three major bases in the world.

It should be said that Zeiss products and technologies have been influencing and promoting almost all industries. Different people will come into contact with Zeiss products in different ways. For example, without Zeiss's optical lens, ASM cannot produce the world's leading extreme ultraviolet lithography machine; in industrial measurement, Zeiss's coordinate measuring machine and a full range of vehicle body inspection solutions are all top equipment Synonymous with; Zeiss manufactured the world’s first microscope. At present, Zeiss’s microscopes include everything from optical microscopes to electron microscopes to X-rays.A full range of microscopic imaging and analysis solutions including microscopes, covering a full range of microscopic analysis from micrometer to sub-nanometer level, and applications covering life sciences, biomedicine, materials science, energy environment and high-tech industries represented by semiconductors Many people come into contact with myopia. Zeiss has not only lenses, but also contact lenses, as well as equipment for laser treatment of myopia, because Zeiss has a full range of solutions for myopia, including hospital eye diagnosis and treatment Needless to say for photography enthusiasts, Zeiss’s lens is no longer a tool, but a culture...In short, any industry, as long as they encounter problems related to light, customers will Take the initiative to find Zeiss and ask Zeiss to develop solutions. Obviously, Zeiss is also the pride of Germany.

Zeiss is the technology of the global optics and optoelectronics industryleader. And with countless "mosts", Zeiss has created a glorious history of more than 170 years. The history of Zeiss is the history of optics. For more than 170 years, Zeiss has always been the invisible champion standing behind, insisting on innovation and insisting on "helping customers succeed." Zeiss has about 30,000 employees, about 30 factories, more than 50 sales and service organizations, and 25 research and development organizations in nearly 50 countries around the world. Zeiss is not a listed company, but is wholly owned by the Carl Zeiss Foundation.

Global consumers have a common impression of German products, that is, precision and reliability. Investigate the reasons, it is the Germans' unremitting pursuit of the scientific theories, precise craftsmanship, and extreme details behind industrial products. It can be said that rigor has become the gene of the Germans. But in the eyes of the Chinese, the Germans’ rigorTo the point of rigidity, it is a dead brain, a muscle. Someone joked that when I arrived in Germany, I realized that there could be more rigid ones.

Some people cannot help asking, why can’t the Chinese make the world’s leading products? Is there not enough money? Obviously it is not. Is there no advanced equipment? Not completely. Is it because there are no top talents, let alone... What the Chinese may lack is the meticulousness of the Germans. Keep improving and pursue the ultimate quality.

The founding of Zeiss is undoubtedly a legend. More than 170 years of history is a long, long story. But the story of Zeiss's establishment and launch of the first microscope is worthy of our careful taste, and it is particularly enlightening for people today to start a business in science and technology. Located in Thuringia, GermanyThe small city of Jena is famous for its optical industry, and the reputation of Jena as the "City of Optics" is certainly attributed to the "Three Musketeers of Zeiss" more than 170 years ago.

The world“s most advanced EUV lithography machine, why can only rely on the optical lens of Zeiss Germany

Ernst Abbe (left); Otto Schott (middle); Carl Zeiss (right)

Carl Zeiss (1816-1888) was a An entrepreneur in optical instruments, he is well-known for the Zeiss company he founded. In the middle of the 19th century, after completing the mechanics training, the 30-year-old Zeiss started in JenaStart your own business. Zeiss borrowed 100 German silver dollars from his brother Edward, who lived in the same area, and officially started his "precision mechanics and optics workshop" business on November 17, 1846. Zeiss did not hire employees at the beginning, he made, repaired and improved different instruments himself. His magnifying glasses made of glass lenses are well received, and products from other manufacturers such as thermometers, binoculars and glasses are also widely favored by customers.

Zeiss’s business is booming, so it expanded its production scale in a short period of time, hired the first batch of employees, and moved into a larger factory. The simple microscope produced by the factory has brought more than expected profits to Zeiss, not only in value, but also higher in quality than peer products.

However, Zeiss was not satisfied with this, and he continued to improve his microscope technology in the next few years. In particular, the “trial and error method” generally adopted at that timeAfter time has passed, the procedure of this method is to change the lens and then change the lens spacing until a usable optical system is reached. Aiming at the low-efficiency system of trial-and-error, Zeiss abandoned the traditional approach and developed an idea of ​​using calculation methods to produce future microscope lenses. Therefore, this precision engineer selected a special employee in 1866 to realize his ideal production process. From this time on, he and the physicist Ernst Abbe (1840–1905) worked together to achieve his great goal and developed a microscope with optical properties that surpassed other similar products on the market. Zeiss was already 50 years old, and Abbe had just turned 26. Maybe they are not a generation, but they have the same vision. This team carefully researched and developed for six years, optimizing and reshaping the microscope, until 1872, Zeiss finally launched an optical performance beyondMicroscopes of all peer products. This competitive advantage has brought international praise to the team, and scientists and physicians highly praise Zeiss microscopes. Zeiss rewarded Abbe’s success through dividends, and in 1875 made Abbe a shareholder of the company.

The company has grown rapidly, and product sales have soared, and more and more employees have joined Zeiss. However, there was still a problem to be solved at that time. Although Zeiss and Abbe succeeded in manufacturing outstanding microscope lenses, they still could not afford special optical glass. They dream of one day they can produce high-quality optical glass in Jena. But how can this dream be realized?

Fortunately, Abbe met Otto Schott (1851–1935), a 28-year-old chemistry and glass expert from Witten, Germany, who developed a small amount of fusion glass procedure . This app allows to try different combinations of ingredients. He incorporated a type of glass with brand-new optical properties, lithium glass. Schott did not hesitate to send a sample of this glass to the world-renowned physicist Abbe in 1879-this opened a fruitful partnership, and this partnership soon became even stronger. As close. Schott later settled in Jena and set up a glass laboratory, which later became the "Jena Schott Glass Factory". SCHOTT first developed and manufactured a new type of optical glass material here, and then invented a heat-resistant and chemical-resistant borosilicate glass (now known as "Jena glass"). This allows him to provide a broader product portfolio. Zeiss, Abbe and Schott-the combination of the three is destined to be a great success.

The appearance of this new type of glass paved the way to high-performance microscopes-apochromatic objectives. Abbe once said, "If Schott hadn't joined, Zeiss andMy career is only half of what it is today. He is a creative and energetic person who brought us his professional skills in the early 1980s. SCHOTT specializes in the production of glass for new Zeiss microscopes. In 1884, SCHOTT and its partners established the Glass Technology Laboratory, owned by Zeiss, Abbe and SCHOTT. Jena Glass has therefore become the world’s most One of the famous glass.

Not long after Zeiss created the epoch-making microscope, that is, in 1888, he passed away in 1888, he transferred his equity to his son Rodrík in his will. Kr sold the equity to Abbe. In 1889, Abbe established the Carl Zeiss Foundation. The foundation established a new group as the owner of the Zeiss company. On June 30, 1891, half of the SCHOTT company Joined the foundation. In 1919, all SCHOTT companies were managed by the foundation.It can be said that the cooperation and friendship between Zeiss, Abbe and SCHOTT in terms of science and interests are still rare even today.

The world“s most advanced EUV lithography machine, why can only rely on the optical lens of Zeiss Germany

Zeiss and Abbe not only represent the pioneering spirit of pioneering science and the courage of entrepreneurs, but also represent strong A sense of social responsibility and outstanding social and political achievements. After the death of Zeiss in 1888, Abbe successfully transferred the company and glass factory together with the Zeiss familyTo the Carl Zeiss Foundation. Most importantly, he wants to ensure that the company's existence is not affected by private interests. Abbe formulated the constitution of the foundation in 1896. Since then, the company's profits have been used to benefit the University of Jena and the citizens of Jena. The legal provisions of the charter are also very pioneering. In an era where there are no labor laws and the relationship between employers and employees is still patriarchal, he has established a feasible legal basis to protect the rights of workers. Although other companies later introduced regulations such as 9 or 8 hours per day (from 1900), these working conditions have long been the norm at Zeiss.

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